Miniature Actuators with Nanometer Precision

Miniature PiezoMike Motors with Nanometer Step Size

• Miniaturized Design with Piezo Ratchet Motor
• High Holding Force to 22lb, Push Force to 4.5lb
• 20 Nanometers Smallest Step Size
• 1/4" and 1/2" Travel
• Lifetime >1,000,000,000 steps
• Self-locking, Ratchet Design, Extremely Stable and No Heat Generation at Rest

Video: How the N-472 Miniature Motorized Actuator with PiezoMike Drive works

Piezo-Walk Nano-Positioning Actuators

Miniature Actuator with Nanometer-Resolution

• 10 mm/sec Speed
• 20 mm Standard Travel Range
• Compact and Cost-Effective Design
• 0.03 nm Resolution
• To 10 N Push/Pull Force
• Low Operating Voltage (40 V)
• Self-Locking, with no Heat Dissipation, Nanometer Stability
• Non-Magnetic and Vacuum-Compatible Working Principle

Compact Piezo-Walk Motor Actuator with Nanometer Accuracy

• Travel Range 10 mm
• Resolution to 0.025 nm Open-Loop, 5 nm Closed-Loop
• Up To 50 N Force Generation and 70 N Holding Force Self-Locking at Rest,
  No Heat Generation
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

High-Force Piezo-Walk Actuator with Nanometer Accuracy for Long-Range Nanopositioning

• Travel Range 20 mm
• Resolution to 0.03 nm Open-Loop, 5 nm Closed-Loop
• Up to 800 N Holding Force
• Self-Locking at Rest
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

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Nonmagnetic PiezoWalk-Motor Miniature Actuator Concept with Nanometer Resolution

• Piezo-Walk Motor-Driven Linear Actuator
• Works in High Magnetic Fields (MRI)
• Up to 70mm Motorized Positioning Range
• Self-Aligning & Self-Locking Design
• Made from non-magnetic materials

Fast Automation Precision Actuator with Voice Coil Linear Motor

• Different Models, Force Generation up to 20 N
• High Speed, to 750 mm/sec
• Closed-Loop Force and Position Control
• Integrated Linear Encoder
• Optional Force Sensor

Ultrasonic-Motor-Driven Miniature Precision Positioner

• Compact High-Speed Stage with Closed-Loop Linear Motor & Linear Encoder
• 18mm to 100mm Travel Range
• Velocity up to 200mm/sec
• Resolution to 10 Nanometers
• Integrated Direct-Metrology Linear Encoder
• AutoLock Feature
• XY Stage Available
• 20000 h MTBF
• Vacuum Versions Available
• Non Magnetic Option

Motorized Actuators

High-Resolution Servo Motor Actuators

• 10, 25 & 50 mm Travel Ranges
• 50 Nanometers Minimum Incremental Motion
• Non-Rotating Tip
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Sub-Nanometer Precision with Optional PZT Drive
• >5,000 Hours MTBF

Low Cost Precision Motorized Linear Actuator, Stepper-Motor, with Limit Switches

• Cost-Efficient Design
• 10 mm or 25 mm Travel Range
• 46 nm Resolution (with C-663 Controller)
• 50 N Load Capacity (M-229)
• Non-Rotating Tip
• Max. Velocity 1.5 mm/s
• Non-Contact Limit and Reference Switches
• Compact Design

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High-Resolution Closed-Loop Servo Motor & Stepper Motor Precision Actuators

• 10 & 25 mm Travel Range
• 50 Nanometers Minimum Incremental Motion
• 10 Nanometer Resolution
• Non-Rotating Tip
• Velocity to 2 mm/sec.
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Origin and Limit Switches
• Front Mount or Clamp Mount
• >5,000 Hours MTBF

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Folded, Compact Precison-Actuator Concept

• 17 mm Travel Range
• 100 Nanometers Minimum Incremental Motion
• Velocity up to 2.5 mm/sec.
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit and Origin Switches
• Fits M-105 & F-110 Fiber Aligners
• >5,000 Hours MTBF

Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators

• 20 mm or 50 mm Travel Range
• 100 Nanometers Minimum Incremental Motion
• High-Speed Direct Drive Option
• 120 N Push/Pull Load
• 100 N Lateral Load Limit
• Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit & Origin Switches
• >20,000 Hours MTBF
• Vacuum Versions

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Heavy-Duty Precision Linear DC-Motor Actuator

• High Load Capacity to 400 N
• Optional 100 Nanometers Direct Metrology Linear Encoder for Exceptional Precision
• Travel Range to 50 mm
• Max. Velocity: 30 mm/sec
• Preloaded Frictionless Ball Screw
• MTBF >20.000 h Vacuum-Compatible Versions Available
  for 10^-6 hPa

Flexure-Guided Nano-Positioning Actuators

Nanometer Accuracy Piezo Lever Amplified Actuator with Flexure Guiding

• Flexure Guidance for Frictionless, Ultra-Straight Motion
• Travel Ranges to 480 Microns
• 0.2 Nanometer Resolution
• High Dynamics and Stiffness
• PICMA^® High-Performance Piezo Actuators
• Open and Closed-Loop Versions
• Ideal for OEM Applications

Nanometer Accuracy Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges

• Frictionless Flexure Guiding System for Straight Motion
• Integrated Motion Amplifier for Travel Ranges to 1 mm
• High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
• Outstanding Lifetime Due to PICMA® Piezo Actuators
• Available with Integrated Position Sensor
• Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
• Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics

Nanometer Accuracy Linear Actuator: Low-cost, Flexure Guided, Large Travel Ranges

• Frictionless, High-Precision Flexure Guiding System
• Travel Ranges to 500 microns
• Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
• Available with Integrated Position Sensor
• Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
• Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible

Z-Nanometer Resolution Flexure Actuator Concept, 1mm

• Vertical Travel to 1000 Micron
• Integrated Double-Flexure Motion Amplifier
• Non-Magnetic Stainless Steel Design

Piezoelectric Positioning Stage with Nanometer Accuracy for NanoAutomation®. Featuring Direct Metrology

• Unique Design: Both Stage and Actuator
• Frictionless Precision Flexure Guiding System
• 0.05 Nanometer Resolution
• Direct Metrology with Capacitive Sensors for Highest Precision
• Ultra-Fast Response, Very Compact
• PICMA^® High-Performance Multilayer Piezo Drives
• ID-Chip for Auto Calibrate Function
• Vacuum Versions Available

Piezo Actuators

High-Performance Monolithic Multilayer Piezo Actuators, Sub-Nanometer Resolution

• Award-Winning Technology
• Low Operating Voltage
• Superior Lifetime Even Under Extreme Conditions
• Very Large Operating-Temperature Range
• High Humidity Resistance
• Excellent Temperature Stability
• High Stiffness
• UHV Compatible to 10-⁹ hPa
• Sub-Millisecond Response & Sub-Nanometer Precision

Chip-Type Nano-Actuators

• Ceramic Encapsulation for Extended Lifetime
• Ultra-Compact, from 2 x 2 x 2 mm
• High Curie Temperature
• Ideal for Dynamic Operation
• Sub-Millisecond Response / Sub-Nanometer Resolution
• UHV Compatible to 10-9 hPa
• Superior Lifetime

Preloaded Piezo Translators (LVPZT), Sub-Nanometer Resolution

• Displacement to 90 microns
• Pushing Forces to 3000 N
• Preloaded for Pulling Forces to 700 N
• Sub-msec Response
• Sub-Nanometer Resolution
• Options: Ball Tip, Vacuum Versions

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High-Force Nano-Precision Piezo Actuators

• Travel Range to 180 microns
• Pushing Forces to 4,500 N or 30,000 N
• Pulling Forces to 500 N or 3,500 N
• Sub-ms Response
• Sub-Nanometer Precision
• Options: Vacuum, High- and Low-Temperature